In the manufacturing of LCD, TFT, CF, and Touch Panel, masks (also known as masks) are used to transfer circuit design graphics to chips in batches, carrying key information such as graphic design and process technology. Defects such as graphic errors and particle scratches on masks can affect the yield of the final product, thereby affecting product performance and reliability.
The VPTek STORM 2000SL series large-sized mask inspection equipment can be applied to mask manufacturing and substrate manufacturing processes in flat panel display industries such as LCD, TFT, CF, Touch Panel, OLED, PDP, etc.
STORM 2000SLV
STORM 2000SLV is a defect inspection equipment developed by VPtek for large-sized Mask substrates, suitable for detecting particles, pinholes, and dirt in polished plates, chromium plates, and uniform adhesive plates. Adopting advanced optical systems, particle and pinhole identification and inspection can be completed through a single scan. For Mask Blank substrate manufacturers, it has significant advantages such as high precision, high efficiency, and ease of use.
Application scenarios
Provide efficient surface defect inspection solutions for Mask substrates with G8.5 and below sizes.
Key Features
- Compatible with RSP200 Nikon Case、 Opening of Crystal Box and Automatic Upper and Lower Plate
- Inspection method based on bright field and dark field
- Pellicle surface, glass surface, inner and outer inspection areas of membrane frame can be flexibly set
- Visual display of the relationship between defect location and graphic location
- Configure an air bath knife to remove surface particles
STORM 2000SLH
STORM 2000SLH is a defect inspection device developed by VPtek for large-sized masks, suitable for detecting graphic defects after lithography of large-sized masks such as LCD, TFT, CF, Touch Panel, etc. Adopting advanced optical imaging and software systems, it can support inspection modes such as DB, DD, SL, etc., and has significant advantages such as high precision, high efficiency, and ease of use for large-sized Mask shop customers.
Application scenarios
Provide an efficient surface defect inspection solution for masks with a size of G8.5 and below, meeting the defect inspection capability of 0.5um.
Key Features
- Maximum support for 8.5-generation panel size
- Support Loader automatic loading and unloading, support docking with AGV
- Adaptive support for multiple substrate sizes
- Support DD, DB, SL inspection modes
- Supports dual optical head scanning, greatly improving inspection efficiency
